Silicon Wafer Manufacturing

Details

Components:

Uni-Guide™

Retrofit or OEM:

OEM

Industries:

Semiconductor

Problem:

Needing a vibration free linear guide that could function in a contaminant-free manufacturing facility.

Solution:

The Uni-Guide with Frelon® J liner provided a complete system free of vibrations and clean-room ready.

Smooth vertical movement of the elevator POD is essential to prevent the wafer in the cassette from vibrating free or out of position for the robot. Either condition could have serious consequences. Destroying the batch of wafers could cost hundreds of thousands of dollars. Although the minienvironment protects the wafers, it is necessary that the environment they reside in remain clean (Class 10) to avoid any contamination during the exterior loading and unloading process. Microprocessors and other IC Chips computational power become a function of the density of the etching of the individual circuits on the wafer. Cleanliness means denser circuits and more computing power.

The automation company originally came to PBC Linear for a chatter or vibration free linear guide that could function in a contaminant-free manufacturing facility without dispersing particulates or requiring lubrication. With its precision design, simple two-piece assembly, and proven Frelon® J liner, the Uni-Guide was the obvious choice to handle the silicon wafer transport system used in the manufacturing process.

Z Axis Wafer Manufacturing

With a proven history in similar applications, the Uni-Guide linear slide has a clean track record providing precise linear motion without added lubricants. The customer, however, was also reaching for more; they wanted a turn-key system to act as the heart of the new wafer elevator.

The PBC Linear solution

PBC Linear’s team of seasoned engineers worked with the customer in designing a complete system that upon delivery simply plugs in and functions perfectly with the rest of the machine. As this mutual relationship has developed, PBC Linear not only supplied the slide but also began to supply the motors, drive screws, guards, and limit switches

Assembled in PBC Linear’s clean workroom, the specially designed Uni-Guide is subject to critical testing for accurate travel and alignment. Careful measures are taken to ensure the sterile transportation of the Uni-Guide from testing to when it arrives at its destination. PBC Linear has maintained their production and documentation in accordance with the regulations set up by the customer and upheld its reputation as the destination for solutions to the most difficult linear motion applications and has supplied product in a timely fashion worldwide.